Lithography
Philips
Philips Innovation Services creates the bridge from idea to market for each innovation journey. Making innovation work, is our drive as well as our deliverable. By bringing together all the required experience, expertise, methods and tools, we get things done. In a reliable, cost-effective way. On time. Driven by our deep technical creativity, we continue where others stop, to make innovation work.
MedPhab partner
[TECHNICAL] TECHNICAL SERVICES
Non-photonic peripherals
NON-PHOTONIC PERIFERALS [MEMS] Si-processing
NP4 MEMS
Si-processing SiN-processing
in vitro diagnostics in vivo diagnostics therapeutics others
Technology provider Supplier Manufacturer Production services Integrator R&D Clinical
Lithography is a process of microfabrication to pattern a drawing or scheme on a substrate that can be a thin film or bulk. For additional information, visit our website: https://www.innovationservices.philips.com/looking-expertise/mems-micro-devices/
Different sustrates Si, III/V, glass…
Wafer size 100 mm
Vertical range 0-327 µm
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ISO 9001, ISO 13485, ISO 14001
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