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III-V processing
III-V Lab
The mission of III-V Lab is to perform research and development on III-V semiconductor components, and integration with Si circuits and micro-systems, from basic research to technology transfer for industrialisation, or to small scale and pilot line production.
MedPhab partner
[TECHNICAL] TECHNICAL SERVICES
Photonic components
PHOTONIC COMPONENTS [Integrated circuits] InP
PC1 Integrated circuits
InP
III-V Lab can fabricate III-V coupons ready for transfert-printing

Complete III-V processing can be achieved in our clean rooms using various technological equipements including:

  • Electronic and optical lithography
  • Dielectric deposition (PECVD)
  • Metallic materials deposition (evaporation or sputtering)
  • RIE and ICP etching with fluoride, chloride or CH4/H2 gas
  • Wet etching
  • Annealing

Characterization equipments are also available, including: SEM, AFM, profilometer, ellipsometer, reflectometer or I(V) measurements.

Wafer size : 2, 3 or 4 inches

1.0
5
5
9001
months
Link to Organization registry