In combination with imec’s silicon photonics platform, we offer reproducible coatings, mainly self-assembled monolayers, deposited via the vapor phase. These biocompatible coatings are compatibe with standard semiconductor processing and ensure covalent binding of bioreceptors (proteins, peptides, DNA, etc.) in a reproducible way. This approach should allow to pave the road towards further industrialization of silicon photonic platforms for life-science applications.